Subject areas suitable for publication include, but are not limited to the following
fields:
 Advanced MOS Devices
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AFM, Scanning Probe Measurements
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Electro-Mechanical Systems (MEMS, NEMS)
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Electron Beam Testers
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Emerging Nanopatterning Methods
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Interconnects
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Laser Assisted Processing
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Laser Probes
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Limits of Nanolithography and Nanopatterning
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Maskless Lithography
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Mesoscopic Devices
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Nanometer Devices for Electronics and Optoelectronics
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New Resist Materials
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Optical Lithography
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Organic and Molecular Electronics
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Polymers and Flexible Substrates
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Silicon on Insulators
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Vacuum Nanoelectronics
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