Nanoscience and Nanotechnology

Nanoscience and Nanotechnology is an international and multidisciplinary peer-reviewed journal covering fundamental and applied research in all disciplines of science, engineering and medicine.

Hutomo Suryo Wasisto

Research Scientist, Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Germany

Research Areas

Micro/Nano-Electro-Mechanical Systems (MEMS/NEMS), Sensors and Actuators, Integrated Circuit and MEMS Packaging, Nanotechnology

Publications: Journals

[1]  H.S.Wasisto, S.Merzsch, F.Steib, A.Waag, E.Peiner.(2014).Vertical silicon nanowire array-patterned microcantilever resonators for enhanced detection of cigarette smoke aerosols.IET Micro & Nano Letters, 9(10), 676 – 679, doi:10.1049/mnl.2014.0249.
[2]  H.S.Wasisto, K.Huang, S.Merzsch, A.Stranz, A.Waag, E.Peiner.(2014).Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications.Microsystem Technologies, 20(4), 571 – 584, doi: 10.1007/s00542-013-1992-8.
[3]  H.S.Wasisto, Q.Zhang, S.Merzsch, A.Waag, E.Peiner.(2014).A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors.Microsystem Technologies, 20(4), 559 – 569, doi: 10.1007/s00542-013-1991-9.
[4]  H.S.Wasisto, S.Merzsch, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Airborne engineered nanoparticle mass sensor based on a silicon resonant cantilever.Sensors and Actuators B: Chemical, 180, 77 – 89, doi: 10.1016/j.snb.2012.04.003.
[5]  H.S.Wasisto, S.Merzsch, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Portable cantilever-based airborne nanoparticle detector.Sensors and Actuators B: Chemical, 187, 118 – 127, doi: 10.1016/j.snb.2012.09.074.
[6]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Silicon resonant nanopillar sensors for airborne titanium dioxide engineered nanoparticle mass detection.Sensors and Actuators B: Chemical, 189, 146 – 156, doi: 10.1016/j.snb.2013.02.053.
[7]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Silicon nanowire resonators: aerosol nanoparticle mass sensing in the workplace.IEEE Nanotechnology Magazine, 7, 18 – 23, doi: 10.1109/MNANO.2013.2260462.(Invited)
[8]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Femtogram aerosol nanoparticle mass sensing utilising vertical silicon nanowire resonators.IET Micro & Nano Letters, 8(10), 554 – 558, doi: 10.1049/mnl.2013.0208.
[9]  H.S.Wasisto, S.Merzsch, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Evaluation of photoresist-based nanoparticle removal method for recycling silicon cantilever mass sensors.Sensors and Actuators A: Physical, 202, 90 – 99, doi: 10.1016/j.sna.2012.12.016.
[10]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2012).Femtogram mass measurement of airborne engineered nanoparticles using silicon nanopillar resonators.Procedia Engineering, 47, 289 – 292, doi: 10.1016/j.proeng.2012.09.140.
[11]  H.S.Wasisto, S.Merzsch, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2012).Effect of photoresist coating on the reusable resonant cantilever sensors for assessing exposure to airborne nanoparticles.Procedia Engineering, 47, 302 – 305,doi: 10.1016/j.proeng.2012.09.143.
[12]  H.S.Wasisto, S.Merzsch, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2012).Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor.Microsystem Technologies, 18, 905 – 915, doi: 10.1007/s00542-011-1405-9.
[13]  H.S.Wasisto, A.Waag, E.Uhde, E.Peiner.(2011).Sensor monitors exposure to airborne nanoparticles.SPIE Newsroom, doi: 10.1117/2.1201105.003685.(Invited)
[14]  S.Merzsch, F.Steib, H.S.Wasisto, A.Stranz, P.Hinze, T.Weimann, E.Peiner, A.Waag.(2014).Production of vertical nanowire resonators by cryogenic-ICP–DRIE. Microsystem Technologies, 20(4), 759 – 767, doi: 10.1007/s00542-013-2032-4.
[15]  S.Merzsch, H.S.Wasisto, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2012).Cleaning of structured templates from nanoparticle accumulation using silicone.Microsystem Technologies, 18, 835–842, doi: 10.1007/s00542-011-1379-7.
[16]  A.P.Herlambang, G.Sheu, Y.Guo, H.S.Wasisto.(2011).LDMOS thermal SOA investigation of a novel 800V multiple RESURF with linear p-top rings.ECS Transactions, 34(1), 979-984, doi: 10.1149/1.3567702.

Publications: Conferences/Workshops/Symposiums

[1]  H.S.Wasisto, S.Merzsch, E.Uhde, A.Waag, E.Peiner.(2014).Fully integrated personal airborne nanoparticle detector based on microelectromechanical resonant cantilever.Proceedings of the 40th International Micro and Nano Engineering Conference (MNE 2014), September 22-26, Lausanne, Switzerland.(Oral)
[2]  H.S.Wasisto, A.Waag, S.Merzsch, E.Uhde, E.Peiner.(2014).Cantilever micro balance as nanoparticle exposure monitor.Proceedings of the 25th Micromechanics and Microsystems Europe workshop (MME 2014), August 31-September 3, Istanbul, Turkey.(Oral).
[3]  H.S.Wasisto, S.Merzsch, F.Steib, E.Uhde, A.Waag, E.Peiner.(2014).Handheld micromechanical cantilever mass sensor for early detection of carbon nanoparticles.Proceedings of the 17.ITG/GMA-Fachtagung Sensoren und Messsysteme 2014, Nürnberg Convention Center, Nürnberg, Germany.(Oral)
[4]  H.S.Wasisto, S.Merzsch, F.Steib, E.Uhde, A.Waag, E.Peiner.(2014).Surface-enhanced silicon resonant cantilever sensors with vertical nanowires.Proceedings of the 17.ITG/GMA-Fachtagung Sensoren und Messsysteme 2014, Nürnberg Convention Center, Nürnberg, Germany.(Oral)
[5]  H.S.Wasisto, S.Merzsch, F.Steib, A.Waag, E.Peiner.(2014).In-plane-excited silicon nanowire arrays-patterned cantilever sensors for enhanced airborne particulate matter exposure detection.Proceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2014), Hawaii, USA, 32 – 37.(Oral)
[6]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Silicon nanowire resonators for aerosol nanoparticle mass sensing.Proceedings of the 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2013), Suzhou, Republic of China, 506 – 509, doi: 10.1109/NEMS.2013.6559781.(Best paper award, 1st winner)
[7]  H.S.Wasisto, Q.Zhang, S.Merzsch, A.Waag, E.Peiner.(2013).A closed-loop system for frequency tracking of piezoresistive cantilever sensors.Proceedings of the SPIE 8763, Smart Sensors, Actuators, and MEMS VI, Grenoble, France, 876337, doi: 10.1117/12.2017009.(Poster)
[8]  H.S.Wasisto, S.Merzsch, K.Huang, A.Stranz, A.Waag, E.Peiner.(2013).Simulation and characterization of silicon nanopillar-based nanoparticle sensors.Proceedings of the SPIE 8763, Smart Sensors, Actuators, and MEMS VI, Grenoble, France, 876321, doi: 10.1117/12.2016970.(Poster)
[9]  H.S.Wasisto, S.Merzsch, A.Waag, E.Peiner.(2013).MEMS-based silicon cantilevers with integrated electrothermal heaters for airborne ultrafine particle sensing.Proceedings of the SPIE 8763, Smart Sensors, Actuators, and MEMS VI, Grenoble, France, 87632L, doi: 10.1117/12.2016938.(Poster)
[10]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2012).Femtogram mass measurement of airborne engineered nanoparticles using silicon nanopillar resonators.Procedia Engineering, the 26th European Conference on Solid-State Transducers (EUROSENSORS 2012), Krakow, Poland, 47, 289 – 292, doi: 10.1016/j.proeng.2012.09.140.(Best young scientist award, 2nd winner)
[11]  H.S.Wasisto, S.Merzsch, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2012).Effect of photoresist coating on the reusable resonant cantilever sensors for assessing exposure to airborne nanoparticles.Procedia Engineering, the 26th European Conference on Solid-State Transducers (EUROSENSORS 2012), Krakow, Poland, 47, 302 – 305, doi: 10.1016/j.proeng.2012.09.143.(Poster)
[12]  H.S.Wasisto, S.Merzsch , A.Waag, E.Uhde, I.Kirsch, E.Peiner.(2012).Selective electrostatic deposition of airborne engineered nanoparticles on a patterned substrate of silicon cantilever sensor.Proceedings of European Aerosol Conference (EAC) 2012, Granada, Spain.(Poster)
[13]  H.S.Wasisto, S.Merzsch, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2012).Silicon cantilever resonators integrated with portable electrostatic samplers for sensing and characterizing engineered nanoparticles in workplace air.Proceedings of the 14th International Meeting on Chemical Sensors (IMCS 2012), Nuremberg, Germany, 221 – 224, doi: 10.5162/IMCS2012/2.4.5.(Oral)
[14]  H.S.Wasisto, S.Merzsch, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2011).Self-exciting and self-sensing resonant cantilever sensors for improved monitoring of airborne nanoparticles exposure.Proceedings of the IEEE Sensors 2011 Conference, Limerick, Ireland, 728 – 731, doi: 10.1109/ICSENS.2011.6127061.(Lecture)
[15]  H.S.Wasisto, S.Merzsch, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2011).Enhanced airborne nanoparticles mass sensing using a high-mode resonant silicon cantilever sensor.Proceedings of the IEEE Sensors 2011 Conference, Limerick, Ireland, 736 – 739, doi: 10.1109/ICSENS.2011.6127053.(Lecture)
[16]  H.S.Wasisto, L.Doering, S.Merzsch, J.Kaehler, A.Waag, E.Uhde, E.Peiner.(2011).Design and modeling of thermally excited microcantilever sensors for airborne nanoparticles mass detection.Proceedings of MikroSystemTechnik Kongress 2011, Darmstadt, Germany.(Poster)
[17]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2011).A resonant cantilever sensor for monitoring airborne nanoparticles.Proceedings of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011), Beijing, Republic of China, 1116 – 1119, doi: 10.1109/TRANSDUCERS.2011.5969233.(Poster)
[18]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, I.Kirsch, T.Salthammer, E.Peiner.(2011).Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticle mass.Proceedings of the SPIE 8066, Smart Sensors, Actuators, and MEMS V, Prague, Czech Republic, 806623, doi:10.1117/12.886622.(Poster)
[19]  H.S.Wasisto, G.Sheu, S.-M.Yang, R.O.Sihombing, Y.Guo, S.-H.Tu, C.-H.Lee, Y.-L.Chin, J.-S.Jan.(2010).A novel 800V multiple RESURF LDMOS utilizing linear p-top rings.Proceedings of IEEE TENCON 2010 Conference, Fukuoka, Japan, 75 – 79, doi: 10.1109/TENCON.2010.5685880.(Oral)
[20]  S.Merzsch, H.S.Wasisto, I.Kirsch, E.Peiner, E.Uhde.(2014).An integrated personal monitor for engineered nanoparticles.Proceedings of the 13th Intern.Conf.Indoor Air Quality and Climate (Indoor Air 2014), Hong Kong, China.(Oral)
[21]  S.Merzsch, H.S.Wasisto, I.Kirsch, A.Waag, E.Peiner, E.Uhde.(2013).Personal monitor for engineered nanoparticles using a MEMS cantilever balance.Proceedings of European Aerosol Conference (EAC) 2013, Prague, Czech Republic.(Poster)
[22]  S.Merzsch, H.S.Wasisto, A.Stranz, P.Hinze, T.Weimann, E.Peiner, A.Waag.(2013).Fabrication of vertical nanowire resonators for aerosol exposure assessment.Proceedings of the SPIE 8763, Smart Sensors, Actuators, and MEMS VI, Grenoble, France, 87630V, doi: 10.1117/12.2016932.(Oral)
[23]  S.Merzsch , T.Salthammer , H.S.Wasisto, I.Kirsch, E.Uhde, A.Waag, E.Peiner.(2013).A personal sampler for direct mass determination of nano-particles using a resonant cantilever sensor.Proceedings of TechConnect World 2013 - Nanotech, Microtech, Biotech, Cleantech Joint 2013 Conferences, Maryland, USA.(Poster)
[24]  S.Merzsch, H.S.Wasisto, E.Peiner, I.Kirsch, E.Uhde.(2012).A MEMS sensor based personal sampler for ultrafine particles.Proceedings of European Aerosol Conference (EAC) 2012, Granada, Spain.(Poster)
[25]  S.Merzsch, J.Kähler, H.S.Wasisto, L.Doering, U.Brand, E.Peiner, A.Waag.(2012).Silicon based sensors and functional components fabricated by ICP-RIE cryogenic dry etching.Proceedings of the 23rd Micromechanics and Microsystems Europe Workshop (MME 2012), Ilmenau, Germany.(Oral)
[26]  S.Merzsch, H.S.Wasisto, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2012).Recycling of cantilevers for nanoparticle detection by lift-off technique.Proceedings of the 14th International Meeting on Chemical Sensors (IMCS 2012), Nuremberg, Germany, 916 – 919, doi: 10.5162/IMCS2012/P1.2.10.(Poster)
[27]  S.Merzsch, H.S.Wasisto, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2011).Low weight electrostatic sampler for airborne nanoparticles.Proceedings of the IEEE Sensors 2011 Conference, Limerick, Ireland, 1177 – 1180, doi: 10.1109/ICSENS.2011.6127335.(Poster)
[28]  S.Merzsch, H.S.Wasisto, A.Waag, E.Peiner.(2011).Membran- und Cantileverherstellung mittels ICP-Kryo-Tiefenätzverfahren aus Silizium-Bulk-Material.Proceedings of MikroSystemTechnik Kongress 2011, Darmstadt, Germany.(Poster)
[29]  S.Merzsch, H.S.Wasisto, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2011).Cleaning of nanopillar templates for nanoparticle collection using PDMS.Proceedings of SPIE 8068, Bioelectronics, Biomedical, and Bioinspired Systems V and Nanotechnology V, Prague, Czech Republic, 806819, doi:10.1117/12.886352.(Poster)
[30]  E.Uhde, I.Kirsch, H.S.Wasisto, S.Merzsch, A.Waag, E.Peiner.(2011).Direct mass determination of ultrafine aerosols using a micro-scale sensor.Proceedings of the 12th International Conference on Indoor Air Quality and Climate (Indoor Air 2011), Austin, Texas, USA.(Poster)
[31]  S.Merzsch, H.S.Wasisto, Ü.Sökmen, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2010).Mass measurement of nanoscale aerosol particles using a piezoelectrically actuated resonant sensor.IEEE Sensors 2010 Conference, Hawaii, USA.(Poster)
[32]  R.O.Sihombing, G.Sheu, S.-M.Yang, H.S.Wasisto, Y.-F.Guo, S.-H.Tu, Y.-L.Chin, J.-S.Jan, C.-H.Lee.(2010).An 800 volts high voltage interconnection level shifter using Floating Poly Field Plate (FPFP) method.Proceedings of IEEE TENCON 2010 Conference, Fukuoka, Japan, 71 – 74, doi: 10.1109/TENCON.2010.5685878.(Oral)