Microelectronics and Solid State Electronics

Microelectronics and Solid State Electronics is an international peer-reviewed journal. It publishes full research papers, short notes and review articles. The journal is dedicated to advanced engineering methods for micro- and nanofabrication of electronic devices, circuits and systems for electronics, electromechanics, and bioelectronics.


Hutomo Suryo Wasisto

Research Scientist, Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Germany

Research Areas

Micro/Nano-Electro-Mechanical Systems (MEMS/NEMS), Sensors and Actuators, Integrated Circuit and MEMS Packaging, Nanotechnology

Publications: Journals

[1]  H.S.Wasisto, S.Merzsch, F.Steib, A.Waag, E.Peiner.(2014).Vertical silicon nanowire array-patterned microcantilever resonators for enhanced detection of cigarette smoke aerosols.IET Micro & Nano Letters, 9(10), 676 – 679, doi:10.1049/mnl.2014.0249.
[2]  H.S.Wasisto, K.Huang, S.Merzsch, A.Stranz, A.Waag, E.Peiner.(2014).Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications.Microsystem Technologies, 20(4), 571 – 584, doi: 10.1007/s00542-013-1992-8.
[3]  H.S.Wasisto, Q.Zhang, S.Merzsch, A.Waag, E.Peiner.(2014).A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors.Microsystem Technologies, 20(4), 559 – 569, doi: 10.1007/s00542-013-1991-9.
[4]  H.S.Wasisto, S.Merzsch, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Airborne engineered nanoparticle mass sensor based on a silicon resonant cantilever.Sensors and Actuators B: Chemical, 180, 77 – 89, doi: 10.1016/j.snb.2012.04.003.
[5]  H.S.Wasisto, S.Merzsch, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Portable cantilever-based airborne nanoparticle detector.Sensors and Actuators B: Chemical, 187, 118 – 127, doi: 10.1016/j.snb.2012.09.074.
[6]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Silicon resonant nanopillar sensors for airborne titanium dioxide engineered nanoparticle mass detection.Sensors and Actuators B: Chemical, 189, 146 – 156, doi: 10.1016/j.snb.2013.02.053.
[7]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Silicon nanowire resonators: aerosol nanoparticle mass sensing in the workplace.IEEE Nanotechnology Magazine, 7, 18 – 23, doi: 10.1109/MNANO.2013.2260462.(Invited)
[8]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Femtogram aerosol nanoparticle mass sensing utilising vertical silicon nanowire resonators.IET Micro & Nano Letters, 8(10), 554 – 558, doi: 10.1049/mnl.2013.0208.
[9]  H.S.Wasisto, S.Merzsch, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Evaluation of photoresist-based nanoparticle removal method for recycling silicon cantilever mass sensors.Sensors and Actuators A: Physical, 202, 90 – 99, doi: 10.1016/j.sna.2012.12.016.
[10]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2012).Femtogram mass measurement of airborne engineered nanoparticles using silicon nanopillar resonators.Procedia Engineering, 47, 289 – 292, doi: 10.1016/j.proeng.2012.09.140.
[11]  H.S.Wasisto, S.Merzsch, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2012).Effect of photoresist coating on the reusable resonant cantilever sensors for assessing exposure to airborne nanoparticles.Procedia Engineering, 47, 302 – 305,doi: 10.1016/j.proeng.2012.09.143.
[12]  H.S.Wasisto, S.Merzsch, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2012).Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor.Microsystem Technologies, 18, 905 – 915, doi: 10.1007/s00542-011-1405-9.
[13]  H.S.Wasisto, A.Waag, E.Uhde, E.Peiner.(2011).Sensor monitors exposure to airborne nanoparticles.SPIE Newsroom, doi: 10.1117/2.1201105.003685.(Invited)
[14]  S.Merzsch, F.Steib, H.S.Wasisto, A.Stranz, P.Hinze, T.Weimann, E.Peiner, A.Waag.(2014).Production of vertical nanowire resonators by cryogenic-ICP–DRIE. Microsystem Technologies, 20(4), 759 – 767, doi: 10.1007/s00542-013-2032-4.
[15]  S.Merzsch, H.S.Wasisto, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2012).Cleaning of structured templates from nanoparticle accumulation using silicone.Microsystem Technologies, 18, 835–842, doi: 10.1007/s00542-011-1379-7.
[16]  A.P.Herlambang, G.Sheu, Y.Guo, H.S.Wasisto.(2011).LDMOS thermal SOA investigation of a novel 800V multiple RESURF with linear p-top rings.ECS Transactions, 34(1), 979-984, doi: 10.1149/1.3567702.

Publications: Conferences/Workshops/Symposiums

[1]  H.S.Wasisto, S.Merzsch, E.Uhde, A.Waag, E.Peiner.(2014).Fully integrated personal airborne nanoparticle detector based on microelectromechanical resonant cantilever.Proceedings of the 40th International Micro and Nano Engineering Conference (MNE 2014), September 22-26, Lausanne, Switzerland.(Oral)
[2]  H.S.Wasisto, A.Waag, S.Merzsch, E.Uhde, E.Peiner.(2014).Cantilever micro balance as nanoparticle exposure monitor.Proceedings of the 25th Micromechanics and Microsystems Europe workshop (MME 2014), August 31-September 3, Istanbul, Turkey.(Oral).
[3]  H.S.Wasisto, S.Merzsch, F.Steib, E.Uhde, A.Waag, E.Peiner.(2014).Handheld micromechanical cantilever mass sensor for early detection of carbon nanoparticles.Proceedings of the 17.ITG/GMA-Fachtagung Sensoren und Messsysteme 2014, Nürnberg Convention Center, Nürnberg, Germany.(Oral)
[4]  H.S.Wasisto, S.Merzsch, F.Steib, E.Uhde, A.Waag, E.Peiner.(2014).Surface-enhanced silicon resonant cantilever sensors with vertical nanowires.Proceedings of the 17.ITG/GMA-Fachtagung Sensoren und Messsysteme 2014, Nürnberg Convention Center, Nürnberg, Germany.(Oral)
[5]  H.S.Wasisto, S.Merzsch, F.Steib, A.Waag, E.Peiner.(2014).In-plane-excited silicon nanowire arrays-patterned cantilever sensors for enhanced airborne particulate matter exposure detection.Proceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2014), Hawaii, USA, 32 – 37.(Oral)
[6]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2013).Silicon nanowire resonators for aerosol nanoparticle mass sensing.Proceedings of the 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2013), Suzhou, Republic of China, 506 – 509, doi: 10.1109/NEMS.2013.6559781.(Best paper award, 1st winner)
[7]  H.S.Wasisto, Q.Zhang, S.Merzsch, A.Waag, E.Peiner.(2013).A closed-loop system for frequency tracking of piezoresistive cantilever sensors.Proceedings of the SPIE 8763, Smart Sensors, Actuators, and MEMS VI, Grenoble, France, 876337, doi: 10.1117/12.2017009.(Poster)
[8]  H.S.Wasisto, S.Merzsch, K.Huang, A.Stranz, A.Waag, E.Peiner.(2013).Simulation and characterization of silicon nanopillar-based nanoparticle sensors.Proceedings of the SPIE 8763, Smart Sensors, Actuators, and MEMS VI, Grenoble, France, 876321, doi: 10.1117/12.2016970.(Poster)
[9]  H.S.Wasisto, S.Merzsch, A.Waag, E.Peiner.(2013).MEMS-based silicon cantilevers with integrated electrothermal heaters for airborne ultrafine particle sensing.Proceedings of the SPIE 8763, Smart Sensors, Actuators, and MEMS VI, Grenoble, France, 87632L, doi: 10.1117/12.2016938.(Poster)
[10]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2012).Femtogram mass measurement of airborne engineered nanoparticles using silicon nanopillar resonators.Procedia Engineering, the 26th European Conference on Solid-State Transducers (EUROSENSORS 2012), Krakow, Poland, 47, 289 – 292, doi: 10.1016/j.proeng.2012.09.140.(Best young scientist award, 2nd winner)
[11]  H.S.Wasisto, S.Merzsch, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2012).Effect of photoresist coating on the reusable resonant cantilever sensors for assessing exposure to airborne nanoparticles.Procedia Engineering, the 26th European Conference on Solid-State Transducers (EUROSENSORS 2012), Krakow, Poland, 47, 302 – 305, doi: 10.1016/j.proeng.2012.09.143.(Poster)
[12]  H.S.Wasisto, S.Merzsch , A.Waag, E.Uhde, I.Kirsch, E.Peiner.(2012).Selective electrostatic deposition of airborne engineered nanoparticles on a patterned substrate of silicon cantilever sensor.Proceedings of European Aerosol Conference (EAC) 2012, Granada, Spain.(Poster)
[13]  H.S.Wasisto, S.Merzsch, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2012).Silicon cantilever resonators integrated with portable electrostatic samplers for sensing and characterizing engineered nanoparticles in workplace air.Proceedings of the 14th International Meeting on Chemical Sensors (IMCS 2012), Nuremberg, Germany, 221 – 224, doi: 10.5162/IMCS2012/2.4.5.(Oral)
[14]  H.S.Wasisto, S.Merzsch, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2011).Self-exciting and self-sensing resonant cantilever sensors for improved monitoring of airborne nanoparticles exposure.Proceedings of the IEEE Sensors 2011 Conference, Limerick, Ireland, 728 – 731, doi: 10.1109/ICSENS.2011.6127061.(Lecture)
[15]  H.S.Wasisto, S.Merzsch, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2011).Enhanced airborne nanoparticles mass sensing using a high-mode resonant silicon cantilever sensor.Proceedings of the IEEE Sensors 2011 Conference, Limerick, Ireland, 736 – 739, doi: 10.1109/ICSENS.2011.6127053.(Lecture)
[16]  H.S.Wasisto, L.Doering, S.Merzsch, J.Kaehler, A.Waag, E.Uhde, E.Peiner.(2011).Design and modeling of thermally excited microcantilever sensors for airborne nanoparticles mass detection.Proceedings of MikroSystemTechnik Kongress 2011, Darmstadt, Germany.(Poster)
[17]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2011).A resonant cantilever sensor for monitoring airborne nanoparticles.Proceedings of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011), Beijing, Republic of China, 1116 – 1119, doi: 10.1109/TRANSDUCERS.2011.5969233.(Poster)
[18]  H.S.Wasisto, S.Merzsch, A.Stranz, A.Waag, E.Uhde, I.Kirsch, T.Salthammer, E.Peiner.(2011).Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticle mass.Proceedings of the SPIE 8066, Smart Sensors, Actuators, and MEMS V, Prague, Czech Republic, 806623, doi:10.1117/12.886622.(Poster)
[19]  H.S.Wasisto, G.Sheu, S.-M.Yang, R.O.Sihombing, Y.Guo, S.-H.Tu, C.-H.Lee, Y.-L.Chin, J.-S.Jan.(2010).A novel 800V multiple RESURF LDMOS utilizing linear p-top rings.Proceedings of IEEE TENCON 2010 Conference, Fukuoka, Japan, 75 – 79, doi: 10.1109/TENCON.2010.5685880.(Oral)
[20]  S.Merzsch, H.S.Wasisto, I.Kirsch, E.Peiner, E.Uhde.(2014).An integrated personal monitor for engineered nanoparticles.Proceedings of the 13th Intern.Conf.Indoor Air Quality and Climate (Indoor Air 2014), Hong Kong, China.(Oral)
[21]  S.Merzsch, H.S.Wasisto, I.Kirsch, A.Waag, E.Peiner, E.Uhde.(2013).Personal monitor for engineered nanoparticles using a MEMS cantilever balance.Proceedings of European Aerosol Conference (EAC) 2013, Prague, Czech Republic.(Poster)
[22]  S.Merzsch, H.S.Wasisto, A.Stranz, P.Hinze, T.Weimann, E.Peiner, A.Waag.(2013).Fabrication of vertical nanowire resonators for aerosol exposure assessment.Proceedings of the SPIE 8763, Smart Sensors, Actuators, and MEMS VI, Grenoble, France, 87630V, doi: 10.1117/12.2016932.(Oral)
[23]  S.Merzsch , T.Salthammer , H.S.Wasisto, I.Kirsch, E.Uhde, A.Waag, E.Peiner.(2013).A personal sampler for direct mass determination of nano-particles using a resonant cantilever sensor.Proceedings of TechConnect World 2013 - Nanotech, Microtech, Biotech, Cleantech Joint 2013 Conferences, Maryland, USA.(Poster)
[24]  S.Merzsch, H.S.Wasisto, E.Peiner, I.Kirsch, E.Uhde.(2012).A MEMS sensor based personal sampler for ultrafine particles.Proceedings of European Aerosol Conference (EAC) 2012, Granada, Spain.(Poster)
[25]  S.Merzsch, J.Kähler, H.S.Wasisto, L.Doering, U.Brand, E.Peiner, A.Waag.(2012).Silicon based sensors and functional components fabricated by ICP-RIE cryogenic dry etching.Proceedings of the 23rd Micromechanics and Microsystems Europe Workshop (MME 2012), Ilmenau, Germany.(Oral)
[26]  S.Merzsch, H.S.Wasisto, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2012).Recycling of cantilevers for nanoparticle detection by lift-off technique.Proceedings of the 14th International Meeting on Chemical Sensors (IMCS 2012), Nuremberg, Germany, 916 – 919, doi: 10.5162/IMCS2012/P1.2.10.(Poster)
[27]  S.Merzsch, H.S.Wasisto, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2011).Low weight electrostatic sampler for airborne nanoparticles.Proceedings of the IEEE Sensors 2011 Conference, Limerick, Ireland, 1177 – 1180, doi: 10.1109/ICSENS.2011.6127335.(Poster)
[28]  S.Merzsch, H.S.Wasisto, A.Waag, E.Peiner.(2011).Membran- und Cantileverherstellung mittels ICP-Kryo-Tiefenätzverfahren aus Silizium-Bulk-Material.Proceedings of MikroSystemTechnik Kongress 2011, Darmstadt, Germany.(Poster)
[29]  S.Merzsch, H.S.Wasisto, A.Waag, I.Kirsch, E.Uhde, T.Salthammer, E.Peiner.(2011).Cleaning of nanopillar templates for nanoparticle collection using PDMS.Proceedings of SPIE 8068, Bioelectronics, Biomedical, and Bioinspired Systems V and Nanotechnology V, Prague, Czech Republic, 806819, doi:10.1117/12.886352.(Poster)
[30]  E.Uhde, I.Kirsch, H.S.Wasisto, S.Merzsch, A.Waag, E.Peiner.(2011).Direct mass determination of ultrafine aerosols using a micro-scale sensor.Proceedings of the 12th International Conference on Indoor Air Quality and Climate (Indoor Air 2011), Austin, Texas, USA.(Poster)
[31]  S.Merzsch, H.S.Wasisto, Ü.Sökmen, A.Waag, E.Uhde, T.Salthammer, E.Peiner.(2010).Mass measurement of nanoscale aerosol particles using a piezoelectrically actuated resonant sensor.IEEE Sensors 2010 Conference, Hawaii, USA.(Poster)
[32]  R.O.Sihombing, G.Sheu, S.-M.Yang, H.S.Wasisto, Y.-F.Guo, S.-H.Tu, Y.-L.Chin, J.-S.Jan, C.-H.Lee.(2010).An 800 volts high voltage interconnection level shifter using Floating Poly Field Plate (FPFP) method.Proceedings of IEEE TENCON 2010 Conference, Fukuoka, Japan, 71 – 74, doi: 10.1109/TENCON.2010.5685878.(Oral)