The stimulating theme of intelligent control and automation (ICA) embraces theories, techniques, applications and latest advancements in ICA. It is the aim of this special issue to offer a platform for the practicing scientists, engineers and academicians worldwide in promoting, discussing and sharing new issues and developments in relation to various aspects of ICA.

Micro-Electro-Mechanical Systems (MEMS) have been gaining an increasing interest by researchers from different fields such as automotive, aerospace, biomedical, communication, and robotics. Microactuators play a major role in most of MEMS devices. Actuation of MEMS devices can be achieved through different mechanisms such as electrostatic, eletrothermal, piezoelectric, or electromagnetic method. Electrostatic actuation is the most commonly applied method in MEMS devices. Electrothermal actuation is an emerging technique that could replace the electrostatic method in various applications that don’t require very fast response time. Controlling these MEMS actuators is one of the most challenges that received considerable attention. Open loop control techniques comes at the expense of sophisticated modeling and achieving exact dynamic behavior. Meanwhile, many issues arise in close loop control techniques such as; cost of additional components, power dissipation, sensors noise, and processing time delay. The aim of this special issue (Control issues of electrostatic and electrothermal MEMS) is to cover the following areas: